BSGS
大宗特殊氣體供應系統
BSGS (Bulk Special Gas System)
Our BSGS designed for a large amounts of special gas supply, include gas SiH4, HCl, NH3, CO2, AsH3, etc. We have a high technology and automatic gas supply system security design, also have intuitive experience for touch panel design, so that customers ease of operation. J-Material also offer a variety of configurations to meet customer demand for Bulk Special Gas System, making equipment more suitable for advanced production environment and the large amounts of gas system supply needs.
Product specifications
BSGS(Bulk Special Gas System) |
|
Dimension(mm) |
1500X650X2200 |
Voltage(V) |
110 |
Frequency(Hz) |
60 |
Phase(φ) |
1φ |
Current(Amp) |
1.3A |
Product features
- Customized program
- Adjustable parameter
- ISO 9001 Quality management systems, Approved by SEMI S2, TS-proof certification
- Design one-to-many Y-Cylinder
- Provide temperature compensation design to reduce cylinder residual gas.
INFORMATION
- No. 1, Ln. 18, Sec. 1, Dakeng Rd., Guishan Dist., Taoyuan City 333, Taiwan (R.O.C.)
- +886-3-3468588
- +886-3-3464588