Issue Occurred
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Possible Causes
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Response Actions
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Insufficient Vacuum
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- AV9 discharge line pneumatic valve is not open
- Insufficient pressure or flow rate in the G-N2 supply for the vacuum generator
- AV6 pneumatic valve is not actuating
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- Confirm that the exhaust line is not isolated
- Confirm G-N2 supply pressure is 70–90 Psi and flow rate is 45–55 SLPM
- Confirm 4.5 kg I.A supply for the pneumatic valve
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System Shutdown
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- Power Failure
- Equipment Short Circuit
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- Check if the power system is supplying 110V 60Hz to the equipment and if the power supply wiring is loose
- Check if any conductive materials have fallen into the control box during installation, causing a short circuit
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P-N2 Pressure Insufficient
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- Pressure regulator valve has not been adjusted to the required pressure
- Pressure transmitter output drifting
- N2 cylinder supply pressure insufficient
- V1N manual valve is not open
- N2 cylinder valve is not open
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- Adjust the pressure regulator valve to supply pressure between 75–95 psi
- Check if the pressure transmitter's output and input are normal; if there is slight drifting, use the equipment's program to calibrate the zero point
- Check if the cylinder supply pressure is sufficient
- Ensure the V1N manual isolation valve for purge gas is open
- Confirm the N2 cylinder valve is open
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Pneumatic Valve Cannot Be Opened
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- I.A drive pressure insufficient
- Pneumatic valve and solenoid valve are incorrectly matched
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- Confirm 4.5 kg I.A supply for the pneumatic valve
- Check if the pneumatic valve and solenoid valve are correctly matched
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Cylinder Connector Leakage
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- The process gas cylinder valve and cylinder connector are either too tight or too loose
- The gasket in the cylinder connector is incorrectly positioned
- The process gas cylinder valve and cylinder connector were not adjusted to the correct position before tightening
- The cylinder valve or cylinder connector is damaged
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- Use a torque wrench to tighten the cylinder connector with a maximum force of 35 lb.ft
- Ensure the gasket is placed in the correct position
- For the cylinder connector and valve connection to the Pigtail, ensure it can be easily hand-tightened
- Check if the cylinder valve or cylinder connector is damaged
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Secondary Supply Pressure Insufficient
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- Pressure regulator valve has not been adjusted to the required pressure
- Primary supply pressure insufficient
- Saturation evaporation temperature of liquid gas is too low
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- Adjust the pressure regulator valve to the required supply pressure for the process
- Check if the steel cylinder outlet to the secondary inlet is isolated
- Consider applying heating to the supply line from the cylinder to the supply piping
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Secondary Supply Pressure Too High
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- The output pressure of the pressure regulator valve is set too high
- The pressure regulator valve is leaking internally
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- Loosen the pressure regulator valve and gradually release the excess pressure through the VENT line, then adjust the regulator valve to the required supply pressure for the process
- Check if the output pressure of the pressure regulator is gradually increasing. If it is, immediately stop the gas supply. Continuous pressure increase could cause damage to the valve and other components, leading to equipment failure and potential harm to personnel.
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Equipment Downtime
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- Communication between PLC and HMI is interrupted
- PLC program loses memory
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- Check if the connection cables between the PLC and HMI are loose or if there is a communication card failure
- If the PLC's internal battery is dead, causing the memory loss (a rare case), replace the battery and reload the program
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