Scrubber

Ecosys Scrubber

Ecosys emission reduction product line covers nearly all modern semiconductor needs.
It supports all types of gases, including PFCs and greenhouse gases, with an emission reduction efficiency of over 99%.
Customized systems and modules are available to suit different exhaust gas types, ensuring optimal compatibility for your operations.

M91 (Combustion-Wet Scrubber)

• Utilizes fuels such as methane and hydrogen.
• Features a strong and stable ignition flame.
• Offers manual/automatic fuel-to-air ratio modes.

M91A (Plasma-Wet Scrubber)

• Ionizes exhaust gases through plasma treatment.
• No fuel required.
• Uses CDA (Clean Dry Air), nitrogen, or argon as the plasma gas.
• Suitable for PFCs.

M91P (Plasma-Wet Scrubber)

• High-temperature plasma torch treatment mode.
• No fuel required.
• Uses CDA (Clean Dry Air), nitrogen, or argon as the plasma gas.
• Suitable for flammable gases.

Integrated Exhaust Gas Treatment System (Marathon)

• Offers the optimal "gas treatment solution" through a combination of advanced emission reduction technologies.
• Processes the "non-recyclable" portions of gases in manufacturing through emission reduction facilities, minimizing environmental impact to the greatest extent.